Wafer Size :3〞、4〞、5〞、6〞、8〞

Dopant :B2H6 , PH3

Epi Wafers Structure:

Single layer:N/N, P/P, P/N, N/P

Multiple layers:N/N/N , P/P/P , N/P/N , P/N/P , P/N/N , N/P/N..

Burried layers:N/BL, P/BL

Epi Specs :
          Resistivity : 0.1~150Ω-cm
          Thickness : 1~150μm

Epi Reactor : Gemini 2, Toshiba, ASM, Mattson